Acuity MEMS Pressure Sensors

 

 

AC3050Die
Acuity Pressure Sensor Products
AC3030Wafer

    AC3070 - 1 mbar Low Pressure - NEW!
    AC3070
    2.4 mm X 2.4 mm

    The AC3070 is a the newest Acuity Pressure die. It is designed for very low pressure applications at 2 mbar and below. This sensor die can been used for amplified sensor applications well below 1 mbar because of its excellent zero stability.

    With 20 mV span at 5 volts and 2 mbar, the sensor is capable of providing a good signal level for very low pressure applications.

     
    AC3050 - 10 mbar Low Pressure
    AC3050
    1.9 mm X 1.9 mm

    The AC3050 is a small, low pressure die designed for applications at 10 mbar and below. This sensor die has been routinely used for amplified sensor applications down below 2.5 mbar because of its excellent zero stability.

    With 50 mV span at 5 volts and 10 mbar, the sensor is capable of providing a good signal level for lower pressure applications.

     
    AC3055 - 10 mbar Precision Low Pressure
    AC30551.9 mm X 1.9 mm

    The AC3055 is identical to the AC3050 with the exception that the sensor has been designed for better linearity but slightly lower span. Featuring over a 3X improvement in linearity compared to the AC3050, this sensor is meant for passive compensation networks.

    The die provides the same stability as the AC3050.

     
    AC3010/AC3012 - 5 PSI to 300 PSI (0.35 to 20 bar) Medium Pressure

    AC3010

    AC30101.8 mm X 1.6 mm

    The AC3010/AC3012 is a general purpose pressure die for measuring pressures in the range of 5 to 300 PSI. The parts are available in 5, 15, 50, 100, 150, and 300 PSI and come both as a guage sensor as well as an absolute sensor.

    The AC3010 has a nominal bridge impedance of 3.6 kohm while the AC3012 has a nominal impedance of 5 kohm.

    Acuity Die Family
    Acuity Die Family
     
     
    AC3030 - 20 to 500 mbar Low Pressure
    1.6 mm X 1.6 mm

    The AC3030 is designed for applications from 20 mbar to 500 mbar. This sensor die comes in multiple ranges and spans many of the typical low pressure ranges.

    The stability of the die enables it to be used, with good performance, down into the 5 mbar range in amplified product applications.

     
    AC3031 - 20 to 500 mbar Low Pressure with in-line metal pads
    AC3031
    1.6 mm X 1.6 mm

    The AC3031 is an AC3030 with a special pad-output. This sensor has all pads along one side to allow for direct wirebonds between the sensor and commonly signal processing ASICs. The sensor is configured as a closed bridge.

    Like the AC3030, the AC3031 comes in 20, 50, 100, 200, and 500 mbar FS ranges.

     
     
       
       

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Acuity Incorporated
Fremont, CA, USA 94539
Phone: +1-510-573-0738
FAX: +1-510-573-3704
 
 
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